NTEGRA Aura

NTEGRA Aura is a Scanning Probe Microscope for studies in the conditions of controlled environment and low vacuum.

The Q-factor of the cantilever in vacuum increases, thus gaining the sensitivity, reliability and accuracy of “probe-sample” light forces measurements. At that, the change from atmosphere pressure to 10-2 Torr vacuum provides the tenfold gain of Q-factor. By further vacuum pumping, Q-factor reaches its plateau and changes insignificantly. Thus, NTEGRA Aura presents the optimal “price/quality” ratio: comparing to the high-vacuum devices it needs much less time – only one minute - to get the vacuum that is needed for the tenfold Q-factor increase. At the same time the system is compact and easy to operate and maintain. As the NTEGRA platform product, NTEGRA Aura has built-in closed loop control for all the axes, optical system with 1 µm resolution and ability to work with more than 40 different AFM methods.

Due to the open architecture, the functionality of NTEGRA Aura can be widen essentially: specialized magnetic measurements with external magnetic field (horizontal, up to +/-0.2T; vertical, up to +/-0.02T), high-temperature experiments (heating up to 300⁰ С with temperature maintaining precision of 0.05⁰ С), etc.

Measuring modes and techniques

STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM

Scan type		Scanning by sample	Scanning by probe^*
Sample size		Up to 40 mm in diameter, up to 15 mm in height	Up to 100 mm in diameter, up to 15 mm in height
Sample weight		Up to 100 g	Up to 300 g
XY sample positiniong range		5x5 mm
Positioning resolution		readable resolution - 5 um sensitivity - 2 um
Scan range		100x100x10 um 3x3x2,6 um	100x100x10 um 50x50x5 um
		Up to 150x150x15 um^**(DualScan^TMmode)
Non linearity, XY (with closed loop sensors)		0.1%	0.15%
Noise level, Z (RMS in bandwidth 1000Hz)	With sensors	0.04 nm (typically), 0.06 nm	0.06 nm (typically), 0.07 nm
	Without sensors	0.03 nm	0.05 nm
Noise level, XY^*** (RMS in bandwidth 200Hz)	With sensors	0.2 nm (typically), 0.3 nm (XY 100 um)	0.1 nm (typically), 0.2 nm
	Without sensors	0.02 nm (XY 100 um), 0.001 nm (XY 3 um)	0.01 nm
Optical viewing system	Optical resolution	1 um	3 um
	Field of view	4.5-0.4 mm	2.0-0.4 mm
	Continuous zoom	available	available
Temperature control	Range	From RT to +150^oC
	Stability	±0.005°C (typically), ±0.01°C
Vacuum system	Pressure	10^-2Torr
Vibration isolation	Active	0.7-1000 Hz
	Passive	above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 um.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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NTEGRA Aura

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